Dr. Gökhan Perçin
Product Engineering Director at Cadence Design Systems Inc
SPIE Involvement:
Publications (11)

Proceedings Article | 31 March 2014 Paper
Changsheng Ying, Yongjun Kwon, Paul Fornari, Gökhan Perçin, Anwei Liu
Proceedings Volume 9052, 905212 (2014) https://doi.org/10.1117/12.2046045
KEYWORDS: Optical proximity correction, Databases, Image classification, Lithography, Data modeling, Image processing, Semiconductor manufacturing, Optical lithography, Instrument modeling, Logic devices

Proceedings Article | 1 April 2013 Paper
Gökhan Perçin, Huixiong Dai, Hsu-Ting Huang, Anwei Liu, Ali Mokhberi, Xin Zheng, Chris Ngai
Proceedings Volume 8679, 86790X (2013) https://doi.org/10.1117/12.2011666
KEYWORDS: Photomasks, Calibration, Extreme ultraviolet lithography, Semiconducting wafers, Lithography, Extreme ultraviolet, Ultraviolet radiation, Metals, High volume manufacturing, Semiconductors

Proceedings Article | 5 April 2012 Paper
Jesus Carrero, Gökhan Perçin
Proceedings Volume 8324, 83240P (2012) https://doi.org/10.1117/12.918055
KEYWORDS: Finite element methods, Metrology, Critical dimension metrology, Electromagnetism, Dielectrics, Maxwell's equations, Optics manufacturing, Double patterning technology, Chemical elements, Semiconductors

Proceedings Article | 30 October 2007 Paper
Kiyoshi Kageyama, Katsuyuki Miyoko, Yoshimitsu Okuda, Gökhan Perçin, Apo Sezginer, Jesus Carrero, Alan Zhu, Anwei Liu
Proceedings Volume 6730, 67302Y (2007) https://doi.org/10.1117/12.746796
KEYWORDS: Photomasks, Databases, Calibration, Process modeling, Critical dimension metrology, Data modeling, Semiconducting wafers, Glasses, Etching, Model-based design

Proceedings Article | 20 October 2006 Paper
Proceedings Volume 6349, 63491Z (2006) https://doi.org/10.1117/12.692931
KEYWORDS: Etching, Calibration, Data modeling, Semiconducting wafers, Particles, Scanning electron microscopy, Chromatic aberrations, Performance modeling, Wafer-level optics, Photomasks

Showing 5 of 11 publications
  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top