Dr. Gökhan Perçin
Product Engineering Director at Cadence Design Systems Inc
SPIE Involvement:
Author
Publications (11)

Proceedings Article | 31 March 2014 Paper
Proc. SPIE. 9052, Optical Microlithography XXVII
KEYWORDS: Lithography, Optical lithography, Data modeling, Databases, Image processing, Semiconductor manufacturing, Image classification, Logic devices, Optical proximity correction, Instrument modeling

Proceedings Article | 1 April 2013 Paper
Proc. SPIE. 8679, Extreme Ultraviolet (EUV) Lithography IV
KEYWORDS: Semiconductors, Lithography, Calibration, Metals, Ultraviolet radiation, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, High volume manufacturing, Semiconducting wafers

Proceedings Article | 5 April 2012 Paper
Proc. SPIE. 8324, Metrology, Inspection, and Process Control for Microlithography XXVI
KEYWORDS: Semiconductors, Metrology, Dielectrics, Finite element methods, Double patterning technology, Critical dimension metrology, Chemical elements, Electromagnetism, Optics manufacturing, Maxwell's equations

Proceedings Article | 30 October 2007 Paper
Proc. SPIE. 6730, Photomask Technology 2007
KEYWORDS: Data modeling, Calibration, Databases, Etching, Glasses, Photomasks, Critical dimension metrology, Semiconducting wafers, Model-based design, Process modeling

Proceedings Article | 20 October 2006 Paper
Proc. SPIE. 6349, Photomask Technology 2006
KEYWORDS: Wafer-level optics, Chromatic aberrations, Data modeling, Calibration, Etching, Particles, Scanning electron microscopy, Photomasks, Semiconducting wafers, Performance modeling

Showing 5 of 11 publications
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