Dr. Göksel Durkaya
at SUNY Poly SEMATECH
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 8 November 2012
Proc. SPIE. 8522, Photomask Technology 2012
KEYWORDS: Particles, Ions, Lamps, Surface roughness, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Neodymium, Radiation effects, Ruthenium

Proceedings Article | 23 March 2012
Proc. SPIE. 8322, Extreme Ultraviolet (EUV) Lithography III
KEYWORDS: Oxides, Silicon, Reflectivity, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Scanning probe microscopy, Radiation effects, Ruthenium, Oxidation

Proceedings Article | 18 August 2009
Proc. SPIE. 7422, Ninth International Conference on Solid State Lighting
KEYWORDS: Sensors, Luminescence, Crystals, X-ray diffraction, Chemical vapor deposition, Raman spectroscopy, Gallium nitride, Sapphire, Chemical analysis, Indium nitride

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top