Dr. Gonzalo Cabodevila
at FEMTO ST
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | May 3, 2011
Proc. SPIE. 8068, Bioelectronics, Biomedical, and Bioinspired Systems V; and Nanotechnology V
KEYWORDS: Blood, Polymers, Capillaries, Skin, Silicon, Medical research, Coating, Manufacturing, In vivo imaging, Semiconducting wafers

PROCEEDINGS ARTICLE | January 19, 2006
Proc. SPIE. 6036, BioMEMS and Nanotechnology II
KEYWORDS: Data modeling, Etching, Skin, Ions, Silicon, Numerical simulations, Aluminum, Deep reactive ion etching, Microfabrication, Semiconducting wafers

PROCEEDINGS ARTICLE | November 14, 2002
Proc. SPIE. 4937, Biomedical Applications of Micro- and Nanoengineering
KEYWORDS: Etching, Argon, Dry etching, Silicon, Photoresist materials, Silicon films, Reactive ion etching, Plasma, Protactinium, Oxidation

PROCEEDINGS ARTICLE | August 18, 1999
Proc. SPIE. 3834, Microrobotics and Microassembly
KEYWORDS: Actuators, Ferroelectric materials, Electrodes, Silicon, Resistance, Atomic force microscopy, Microactuators, Head, Aluminum, Shape memory alloys

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