Dr. Gonzalo Cabodevila
at FEMTO ST
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 3 May 2011
Proc. SPIE. 8068, Bioelectronics, Biomedical, and Bioinspired Systems V; and Nanotechnology V
KEYWORDS: Skin, Polymers, In vivo imaging, Capillaries, Blood, Silicon, Coating, Medical research, Semiconducting wafers, Manufacturing

Proceedings Article | 19 January 2006
Proc. SPIE. 6036, BioMEMS and Nanotechnology II
KEYWORDS: Skin, Silicon, Data modeling, Deep reactive ion etching, Numerical simulations, Microfabrication, Semiconducting wafers, Aluminum, Ions, Etching

Proceedings Article | 14 November 2002
Proc. SPIE. 4937, Biomedical Applications of Micro- and Nanoengineering
KEYWORDS: Etching, Silicon, Reactive ion etching, Silicon films, Photoresist materials, Dry etching, Argon, Plasma, Protactinium, Oxidation

Proceedings Article | 18 August 1999
Proc. SPIE. 3834, Microrobotics and Microassembly
KEYWORDS: Microactuators, Actuators, Ferroelectric materials, Shape memory alloys, Head, Electrodes, Silicon, Aluminum, Resistance, Atomic force microscopy

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