Dr. Gonzalo Sanguinetti Profile

Dr. Gonzalo Sanguinetti

at ASML Netherlands BV

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Publications (2)

Proceedings Article | 22 February 2021 Presentation + Paper

Fast in-device overlay metrology on multi-tier 3DNAND devices without DECAP and its applications in process characterization and control

Yaobin Feng, Pandeng Xuan, Dean Wu, Bruce Yang, Craig Xu, Neo Liu, Pavel Izikson, Huanian You, Xi-Zhi Yan, Vladimir Markov, Yvon Chai, Chaoyu Chen, Bert Verstraeten, Amy Wang, Gonzalo Sanguinetti, Giacomo Miceli, Jelmer Boter, Vidar Van der Meijden, Hua Li, Babak Mozooni

Proceedings Volume 11611, 116110V (2021) https://doi.org/10.1117/12.2583416

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Proceedings Article | 20 March 2020 Paper

A novel accurate and robust technique in after-etch overlay metrology of 3D-NAND’s memory holes

Yaobin Feng, Dean Wu, Pandeng Xuan, Pavel Izikson, Payne Qi, Huanian You, Yvon Chai, Jan Jitse Venselaar, Giulio Bottegal, Gonzalo Sanguinetti, Bert Verstraeten, Tjitte Nooitgedagt, Babak Mozooni

Proceedings Volume 11325, 1132522 (2020) https://doi.org/10.1117/12.2553054

KEYWORDS: Optical metrology, Overlay metrology, Semiconducting wafers, Signal processing, Metrology, Machine learning, Image processing, Optical signal processing, Optics manufacturing

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