Dr. Gota Niimi
Post Doctoral Researcher at XTREME technologies GmbH
SPIE Involvement:
Publications (10)

Proceedings Article | 17 July 2015
Proc. SPIE. 9524, International Conference on Optical and Photonic Engineering (icOPEN 2015)
KEYWORDS: Light sources, Curtains, Electrodes, Capillaries, Magnetism, Xenon, Extreme ultraviolet, X-ray lasers, Plasma, Tin

Proceedings Article | 17 April 2014
Proc. SPIE. 9048, Extreme Ultraviolet (EUV) Lithography V
KEYWORDS: Lithography, Electrodes, Reliability, Inspection, Laser stabilization, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Plasma, Tin

Proceedings Article | 20 March 2010
Proc. SPIE. 7636, Extreme Ultraviolet (EUV) Lithography
KEYWORDS: Lithography, Electrodes, Scanners, Ultraviolet radiation, Reliability, Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers, Plasma, Tin

Proceedings Article | 21 March 2007
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Mirrors, Electrodes, Reflectivity, Magnetism, Xenon, Extreme ultraviolet, Halogens, Ruthenium, Plasma, Tin

Proceedings Article | 24 March 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Capacitors, Electrodes, Capillaries, Magnetism, Xenon, Head, Extreme ultraviolet, Extreme ultraviolet lithography, Plasma, Tin

Showing 5 of 10 publications
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