Dr. Gottlieb S. Oehrlein
at Univ of Maryland College Park
SPIE Involvement:
Conference Program Committee | Conference Chair | Conference Co-Chair | Author | Editor
Publications (7)

PROCEEDINGS ARTICLE | March 19, 2018
Proc. SPIE. 10584, Novel Patterning Technologies 2018
KEYWORDS: Thin films, Lithography, Visible radiation, Optical lithography, Etching, Silicon, Resistance, Photoresist materials, Semiconducting wafers, Plasma

PROCEEDINGS ARTICLE | March 19, 2018
Proc. SPIE. 10584, Novel Patterning Technologies 2018
KEYWORDS: Thin films, Lithography, Point spread functions, Optical lithography, Etching, Microscopy, Molecules, Photoresist materials, Stimulated emission depletion microscopy, Absorption

SPIE Conference Volume | April 22, 2014

SPIE Journal Paper | December 23, 2013
JM3 Vol. 12 Issue 04
KEYWORDS: CMOS technology, Optical lithography, Plasma etching, Etching, Plasma, Semiconductors, Lithography, Extreme ultraviolet, Line edge roughness, Directed self assembly

SPIE Conference Volume | April 16, 2013

SPIE Conference Volume | April 16, 2012

Showing 5 of 7 publications
Conference Committee Involvement (7)
Advanced Etch Technology for Nanopatterning VII
26 February 2018 | San Jose, California, United States
Advanced Etch Technology for Nanopatterning VI
27 February 2017 | San Jose, California, United States
Advanced Etch Technology for Nanopatterning V
22 February 2016 | San Jose, California, United States
Advanced Etch Technology for Nanopatterning IV
23 February 2015 | San Jose, California, United States
Advanced Etch Technology for Nanopatterning III
24 February 2014 | San Jose, California, United States
Showing 5 of 7 published special sections
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top