Dr. Gowri P. Kota
at Lam Research Corp
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | July 1, 2003
Proc. SPIE. 5044, Advanced Process Control and Automation
KEYWORDS: Wafer-level optics, Metrology, Cadmium, Etching, Scanning electron microscopy, Process control, Integrated optics, Transistors, Critical dimension metrology, Semiconducting wafers

PROCEEDINGS ARTICLE | June 26, 2003
Proc. SPIE. 5040, Optical Microlithography XVI
KEYWORDS: Lithography, Metrology, Optical lithography, Stars, Cadmium, Etching, Silicon, Process control, Critical dimension metrology, Semiconducting wafers

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