Graham McKinnon
President at Norcada Inc
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 9 March 2013 Paper
Proc. SPIE. 8612, Micromachining and Microfabrication Process Technology XVIII
KEYWORDS: Etching, Mirrors, Deep reactive ion etching, Actuators, Microelectromechanical systems, Polishing, Silicon, Plasma etching, Semiconducting wafers, Surface finishing

Proceedings Article | 17 October 2012 Paper
Proc. SPIE. 8490, Laser Beam Shaping XIII
KEYWORDS: Actuators, Oxides, Mirrors, Tunable lasers, Microelectromechanical systems, Silicon, Semiconducting wafers, Deep reactive ion etching, Etching, Optical alignment

SPIE Journal Paper | 20 June 2012
JM3 Vol. 11 Issue 02
KEYWORDS: Actuators, Deep reactive ion etching, Etching, Microelectromechanical systems, Oxides, Silicon, Scanning electron microscopy, Gold, Sputter deposition, Atomic force microscopy

Proceedings Article | 7 February 2012 Paper
Proc. SPIE. 8248, Micromachining and Microfabrication Process Technology XVII
KEYWORDS: Etching, Deep reactive ion etching, Actuators, Oxides, Microelectromechanical systems, Reactive ion etching, Scanning electron microscopy, Polymers, Silicon, Semiconducting wafers

Proceedings Volume Editor (1)

Conference Committee Involvement (2)
Material Processing and Optical Machining
29 September 2004 | Ottawa, Ontario, Canada
Material Processing, Optical Machining, and Nanotechnologies
9 May 2002 | Ottawa, Ontario, Canada
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