Four B-implanted p-n junction silicon light-emitting diodes were designed and simulated under identical fabrication
process and recombination mechanisms by using Silvaco simulators. In the simulations, the implant energy and dose
and the post-implant anneal temperature were varied to compare the designs in terms of band-to-band radiative
recombination rates and locations. It was found that a pillar design wrapped with p-n junction has the greatest radiative
recombination rate. Regardless of the designs, the radiative recombination rate is always higher in the B-implanted p+
region than in the n- substrate. When the implant energy and dose are kept constant, there exists a peak in maximum
radiative recombination rate when the anneal temperature increases from 700 to 1100 °C, and the temperature at peak
increases while the implant dose increases. When the anneal temperature is kept constant, the radiative recombination
rate always increases with implant dose but saturates at a dose when maximum solubility of dopants is reached at the
temperature; however, the radiative recombination rate does not change significantly with implant energy. It was found
that the effects of implant parameters and anneal conditions on BB radiative recombination rate could be correlated with
active dopant concentration. In order to achieve high-efficiency silicon p-n junction diodes, implant parameters and
anneal conditions must be optimized to maximize the active dopant concentration in the p+ region along with the spatial
confinement of extended defects.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.