Gregg A. Inderhees
Director of Strategic Marketing at KLA Corp
SPIE Involvement:
Author
Publications (20)

Proceedings Article | 26 September 2019 Paper
Proc. SPIE. 11148, Photomask Technology 2019
KEYWORDS: Lithography, Scanners, Manufacturing, Inspection, Computer simulations, Photomasks, Optical proximity correction, Mask making, Semiconducting wafers, Defect inspection

Proceedings Article | 3 October 2018 Paper
Proc. SPIE. 10810, Photomask Technology 2018
KEYWORDS: Reticles, Optical lithography, Coating, Inspection, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Yield improvement

Proceedings Article | 16 October 2017 Paper
Proc. SPIE. 10451, Photomask Technology 2017
KEYWORDS: Reticles, Defect detection, Scattering, Particles, Light scattering, Inspection, Photomasks, Extreme ultraviolet, Optics manufacturing, EUV optics

Proceedings Article | 1 October 2013 Paper
Proc. SPIE. 8886, 29th European Mask and Lithography Conference
KEYWORDS: Lithography, Calibration, Image processing, Scanners, Inspection, Printing, Photomasks, Source mask optimization, SRAF, Model-based design

Proceedings Article | 28 June 2013 Paper
Proc. SPIE. 8701, Photomask and Next-Generation Lithography Mask Technology XX
KEYWORDS: Reticles, Defect detection, Data modeling, Databases, Particles, Inspection, Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers, EUV optics

Showing 5 of 20 publications
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