Gregor Frank Dellemann
Vice President Strategic Business Development at Carl Zeiss SMT GmbH
SPIE Involvement:
Author
Publications (5)

PROCEEDINGS ARTICLE | March 8, 2016
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Semiconductors, Electron beam lithography, Electron beams, Sensors, Metals, Image processing, Electrons, Inspection, Scanning electron microscopy, Wafer inspection, Semiconducting wafers, Tin, Defect inspection

PROCEEDINGS ARTICLE | September 4, 2015
Proc. SPIE. 9661, 31st European Mask and Lithography Conference
KEYWORDS: Wafer-level optics, Imaging systems, Inspection, Optical inspection, Wafer inspection, Photomasks, Extreme ultraviolet, Semiconducting wafers, Optics manufacturing, Defect inspection

PROCEEDINGS ARTICLE | March 19, 2015
Proc. SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX
KEYWORDS: Semiconductors, Signal to noise ratio, Beam splitters, Electron beams, Sensors, Image processing, Microscopy, Image resolution, Scanning electron microscopy, Brain

PROCEEDINGS ARTICLE | March 19, 2015
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Manufacturing, Inspection, Optical inspection, Wafer inspection, Photomasks, Extreme ultraviolet, Semiconducting wafers, Optics manufacturing, Prototyping, Defect inspection

PROCEEDINGS ARTICLE | June 10, 2004
Proc. SPIE. 5317, Optical Fibers and Sensors for Medical Applications IV
KEYWORDS: Optical fibers, Mirrors, Laser therapeutics, Tissues, Surgery, Fiber lasers, Gas lasers, Connectors, Carbon monoxide, Laser tissue interaction

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