Prof. Gregor Feiertag Profile

Prof. Gregor Feiertag

at Hochschule für Angewandte Wissenschaften München

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Publications (5)

Proceedings Article | 17 May 2013 Paper

Flip-chip packaging of piezoresistive barometric pressure sensors

T. Waber, W. Pahl, M. Schmidt, G. Feiertag, S. Stufler, R. Dudek, A. Leidl

Proceedings Volume 8763, 87632D (2013) https://doi.org/10.1117/12.2016459

KEYWORDS: Sensors, Packaging, Copper, Adhesives, Microelectromechanical systems, Aluminum, Ceramics, Standards development, Temperature metrology, Sensor technology

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Proceedings Article | 19 May 2009 Paper

Packaging of MEMS microphones

Gregor Feiertag, Matthias Winter, Anton Leidl

Proceedings Volume 7362, 73620D (2009) https://doi.org/10.1117/12.821186

KEYWORDS: Microelectromechanical systems, Packaging, Ceramics, Polymers, Semiconducting wafers, Acoustics, Reliability, Silicon, Metals, Cell phones

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Proceedings Article | 19 May 2009 Paper

A method for improving the drop test performance of a MEMS microphone

Matthias Winter, Seifeddine Ben Aoun, Gregor Feiertag, Anton Leidl, Patrick Scheele, Helmut Seidel

Proceedings Volume 7362, 736214 (2009) https://doi.org/10.1117/12.821187

KEYWORDS: Microelectromechanical systems, Electrodes, Resistance, Acoustics, Tolerancing, Linear filtering, Device simulation, MATLAB, Capacitance, Silicon

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Proceedings Article | 1 September 1998 Paper

Pattern transfer accuracy in deep x-ray lithography: calculation and experimental results

Andreas Schmidt, Wolfgang Ehrfeld, Gregor Feiertag, Regina Luettge, Martin Schmidt

Proceedings Volume 3512, (1998) https://doi.org/10.1117/12.324067

KEYWORDS: Photomasks, Luminescence, X-ray lithography, Gold, Beryllium, Optical alignment, Polymethylmethacrylate, Silicon, Electrons, X-rays

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Proceedings Article | 7 July 1997 Paper

Sloped irradiation techniques in deep x-ray lithography for 3D shaping of microstructures

Gregor Feiertag, Wolfgang Ehrfeld, Heinz Lehr, Martin Schmidt

Proceedings Volume 3048, (1997) https://doi.org/10.1117/12.275770

KEYWORDS: Photomasks, X-ray lithography, Scanners, 3D microstructuring, X-rays, Microfluidics, Polymethylmethacrylate, Synchrotron radiation, Metals, Polymers

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