Prof. Gregory H. Denbeaux
Associate Professor Nanoengineering
SPIE Involvement:
Publications (64)

Proceedings Article | 23 April 2024 Presentation + Paper
Proceedings Volume 12957, 1295709 (2024)
KEYWORDS: Annealing, Photoresist processing, Coating, Viscosity, Solids, Polymers, Film thickness, Thin film coatings, Stochastic processes, Photoresist materials

Proceedings Article | 30 April 2023 Presentation
Proceedings Volume 12498, 124980G (2023)
KEYWORDS: Stochastic processes, Extreme ultraviolet, Extreme ultraviolet lithography, Solids, Photoresist materials, Line edge roughness, Coating, Thermodynamics, Photoresist processing, Molecules

SPIE Journal Paper | 17 June 2021
Eric Liu, Katie Lutker-Lee, Qiaowei Lou, Ya-Ming Chen, Angélique Raley, Peter Biolsi, Kai-Hung Yu, Gregory Denbeaux
JM3, Vol. 20, Issue 02, 024901, (June 2021)
KEYWORDS: Line edge roughness, System on a chip, Extreme ultraviolet, Plasma, Etching, Lithography, Silicon, Double patterning technology, Line width roughness, Extreme ultraviolet lithography

Proceedings Article | 8 April 2019 Paper
Shaheen Hasan, Michael Murphy, Maximilian Weires, Steven Grzeskowiak, Greg Denbeaux, Robert Brainard
Proceedings Volume 10960, 109601Q (2019)
KEYWORDS: Antimony, Extreme ultraviolet lithography, Polymers, Extreme ultraviolet, Polymerization, Photoresist materials, Metals

Proceedings Article | 27 March 2019 Presentation + Paper
Michael Murphy, Shaheen Hasan, Steven Novak, Greg Denbeaux, Robert Brainard
Proceedings Volume 10960, 1096010 (2019)
KEYWORDS: Antimony, Ions, Extreme ultraviolet lithography, Photoresist materials, Photoresist developing, Oxides, Extreme ultraviolet, Metals, Bismuth

Showing 5 of 64 publications
  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top