Dr. Gregory L. Kirk Profile

Dr. Gregory L. Kirk

Managing Director of Architecture at Applied Materials Inc

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Publications (2)

Proceedings Article | 20 March 2010 Paper

The analysis of EUV mask defects using a wafer defect inspection system

Kyoung-Yong Cho, Joo-On Park, Changmin Park, Young-Mi Lee, In-Yong Kang, Jeong-Ho Yeo, Seong-Woon Choi, Chan-Hoon Park, Steven Lange, SungChan Cho, Robert Danen, Gregory Kirk, Yeon-Ho Pae

Proceedings Volume 7636, 76361E (2010) https://doi.org/10.1117/12.846482

KEYWORDS: Semiconducting wafers, Photomasks, Line width roughness, Inspection, Wafer inspection, Scanning electron microscopy, Defect detection, Signal to noise ratio, Extreme ultraviolet lithography, Line edge roughness

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Proceedings Article | 21 June 2002 Paper

Soft lithography and surface chemistry: enabling tools for new bioassays

Bernardo Aumond, Oliver Schueller, David Duffy, Emanuele Ostuni, Enoch Kim, Aaron Raphel, Christian Hodneland, Stewart Campbell, Gregory Kirk

Proceedings Volume 4626, (2002) https://doi.org/10.1117/12.491185

KEYWORDS: Lithography, Optical lithography, Chemistry, Proteins, Chemical elements, Self-assembled monolayers, Printing, Gold, Liquids, Polymers

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