Dr. Gregory M. Wallraff
Staff Scientist at IBM Research - Almaden
SPIE Involvement:
Author
Publications (49)

Proceedings Article | 26 September 2019
Proc. SPIE. 11147, International Conference on Extreme Ultraviolet Lithography 2019
KEYWORDS: Lithography, Polymers, Molecules, Printing, Photoresist materials, Extreme ultraviolet, Extreme ultraviolet lithography, Photoresist processing, Stochastic processes, Polymer thin films

Proceedings Article | 25 March 2019
Proc. SPIE. 10960, Advances in Patterning Materials and Processes XXXVI
KEYWORDS: Semiconductors, Metals, Manufacturing, Photoresist materials, Extreme ultraviolet, Semiconductor manufacturing, Extreme ultraviolet lithography, Photochemistry, Thermal modeling, Resolution enhancement technologies

Proceedings Article | 25 March 2019
Proc. SPIE. 10960, Advances in Patterning Materials and Processes XXXVI
KEYWORDS: Semiconductors, Metals, Electrons, Photoresist materials, Extreme ultraviolet, Semiconductor manufacturing, Extreme ultraviolet lithography, High volume manufacturing, Photoresist processing, Systems modeling

Proceedings Article | 16 October 2017
Proc. SPIE. 10450, International Conference on Extreme Ultraviolet Lithography 2017
KEYWORDS: Photons, Molecules, Electrons, Photoresist materials, Extreme ultraviolet, Extreme ultraviolet lithography

Proceedings Article | 27 March 2014
Proc. SPIE. 9051, Advances in Patterning Materials and Processes XXXI
KEYWORDS: Lithography, Lithium, Polymers, Image processing, Ions, Reflectivity, Photoresist processing, Semiconducting wafers, Standards development, Image quality standards

Showing 5 of 49 publications
Conference Committee Involvement (6)
Advances in Resist Materials and Processing Technology XXVIII
28 February 2011 | San Jose, California, United States
Advances in Resist Materials and Processing Technology XXVII
22 February 2010 | San Jose, California, United States
Advances in Resist Materials and Processing Technology XXVI
23 February 2009 | San Jose, California, United States
Advances in Resist Materials and Processing Technology XXV
25 February 2008 | San Jose, California, United States
Advances in Resist Materials and Processing Technology XXIV
26 February 2007 | San Jose, California, United States
Showing 5 of 6 Conference Committees
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