Gregory J. Dick
Senior Member of Technical Staff at
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | March 20, 2018
Proc. SPIE. 10588, Design-Process-Technology Co-optimization for Manufacturability XII
KEYWORDS: Genetic algorithms, Data processing, Photomasks, Optical proximity correction, Optimization (mathematics)

PROCEEDINGS ARTICLE | May 5, 2005
Proc. SPIE. 5756, Design and Process Integration for Microelectronic Manufacturing III
KEYWORDS: Lithography, Reticles, Data modeling, Error analysis, Manufacturing, Data archive systems, Photomasks, Optical proximity correction, Semiconducting wafers, Model-based design

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