Dr. Grzegorz Gwalt
at Helmholtz-Zentrum Berlin für Materialien und Energie GmbH
SPIE Involvement:
Publications (4)

Proceedings Article | 9 June 2023 Presentation
Proceedings Volume PC12581, PC1258109 (2023) https://doi.org/10.1117/12.2666473
KEYWORDS: Optical components, Metrology, X-rays, X-ray optics, X-ray diffraction, X-ray characterization, Reflectivity, Manufacturing, Mirrors, Free electron lasers

Proceedings Article | 27 April 2023 Presentation + Paper
Philipp Hönicke, Yves Kayser, Victor Soltwisch, Andre Wählisch, Nils Wauschkuhn, Jeroen Scheerder, Claudia Fleischmann, Janusz Bogdanowicz, Anne-Laure Charley, Anabela Veloso, Roger Loo, Hans Mertens, Andriy Hikavyy, Thomas Siefke, Anna Andrle, Grzegorz Gwalt, Frank Siewert, Richard Ciesielski, Burkhard Beckhoff
Proceedings Volume 12496, 124961J (2023) https://doi.org/10.1117/12.2657963
KEYWORDS: Nanostructures, X-ray fluorescence spectroscopy, Metrology, Semiconductors, Fluorescence intensity, Data modeling, Transmission electron microscopy, Small targets

Proceedings Article | 22 February 2021 Presentation
Anna Andrle, Philipp Hönicke, Grzegorz Gwalt, Philipp-Immanuel Schneider, Yves Kayser, Frank Siewert, Victor Soltwisch
Proceedings Volume 11611, 116110R (2021) https://doi.org/10.1117/12.2586082
KEYWORDS: Nanostructures, Metrology, Machine learning, X-rays, X-ray optics, X-ray fluorescence spectroscopy, Statistical analysis, Semiconducting wafers, Reflectivity, Nondestructive evaluation

Proceedings Article | 9 September 2019 Presentation + Paper
Proceedings Volume 11109, 111090N (2019) https://doi.org/10.1117/12.2529308
KEYWORDS: Mirrors, Deflectometry, Synchrotrons, Ion beams, Ion beam finishing, Nano opto mechanical systems, Spatial resolution, Photons, Optics manufacturing, Ray tracing

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