Guangyao Jia
at Univ of California Irvine
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | August 16, 2004
Proc. SPIE. 5455, MEMS, MOEMS, and Micromachining
KEYWORDS: Microelectromechanical systems, Gold, Carbon, Lithium, Electrodes, Silicon, Manufacturing, Oxygen, Photoresist materials, Photoresist developing

PROCEEDINGS ARTICLE | August 16, 2004
Proc. SPIE. 5455, MEMS, MOEMS, and Micromachining
KEYWORDS: Gold, Lithography, Microfluidics, Glasses, Luminescence, Molecules, Diffusion, Photoresist materials, Compact discs, Self-assembled monolayers

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