Dr. Guido J. Rademaker
Research engineer at CEA-LETI
SPIE Involvement:
Publications (16)

SPIE Journal Paper | 8 March 2024
Timothée Choisnet, Abdelali Hammouti, Vincent Gagneur, Jérôme Reche, Guido Rademaker, Guillaume Freychet, Guillaume Jullien, Julien Ducoté, Patrice Gergaud, Delphine Le Cunff
JM3, Vol. 23, Issue 01, 014002, (March 2024) https://doi.org/10.1117/12.10.1117/1.JMM.23.1.014002
KEYWORDS: Critical dimension metrology, Transmission electron microscopy, Cadmium, X-rays, Synchrotrons, Silicon, Semiconducting wafers, Lithography, Scanning electron microscopy, Chromium

SPIE Journal Paper | 24 June 2023
JM3, Vol. 22, Issue 03, 031210, (June 2023) https://doi.org/10.1117/12.10.1117/1.JMM.22.3.031210
KEYWORDS: X-rays, X-ray sources, Scattering, Grazing incidence, Silicon, Reflection, Laser scattering, Atomic force microscopy, X-ray microscopy, X-ray technology

Proceedings Article | 27 April 2023 Presentation + Paper
Delphine Le Cunff, Patrice Gergaud, Guido Rademaker, Jérôme Reche, Guillaume Jullien, Julien Ducote, Timothée Choisnet, Guillaume Freychet, Abdelali Hammouti, Vincent Gagneur
Proceedings Volume 12496, 124961K (2023) https://doi.org/10.1117/12.2657661
KEYWORDS: Transmission electron microscopy, Synchrotrons, Scanning electron microscopy, Critical dimension metrology, Semiconducting wafers, Cadmium, X-rays, Scattering, Lithography, Silicon

Proceedings Article | 27 April 2023 Presentation + Paper
Proceedings Volume 12496, 124961L (2023) https://doi.org/10.1117/12.2657500
KEYWORDS: X-rays, Scattering, X-ray sources, Grazing incidence, Silicon, Reflection, Metrology, Atomic force microscopy, Genetic algorithms, Signal intensity

Proceedings Article | 1 November 2022 Paper
Thibaut Bourguignon, Jonathan Pradelles, Bertrand Le Gratiet, Sébastien Bérard-Bergery, Guido Rademaker, Nicolas Possémé
Proceedings Volume 12472, 124720C (2022) https://doi.org/10.1117/12.2640140
KEYWORDS: Overlay metrology, Scanning electron microscopy, Monte Carlo methods, Metrology, Image processing, Image quality, Semiconducting wafers, Reliability

Showing 5 of 16 publications
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