Detection and quantification of very small amounts of biological species become necessary to allow an early detection of
biothreats. Currently, fluorescence detection and colorimetry are the most frequently used techniques. Although very
sensitive, the necessary labelling step of the biotargets can alter their recognition properties and these methods have a
low potential for integration. This explains the constant effort of research on label-free detection methods. Onedimensional
nanostructures, such as silicon nanowires, have emerged as good candidates for ultra-sensitive electrical
detection of biological species. A silicon nanowire can operate as the channel of a field-effect transistor whose
conductance is modulated by the change of charge of its surface due to the binding of biological species.
A top-down fabrication process of silicon nanowire field effect transistors was developed on SOI and the influence of
several physico-chemical parameters such as environmental electrostatic charges, light, buffer salinity and flow rate was
evaluated. A change of the conductance of the Si nanowire according to the pH of the solution was demonstrated. Si
nanowires were also tested as biosensors and allowed us to a better understanding of the involved phenomena.
Complementary measurements are currently under progress.
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