Dr. Guillaume Freychet
Beamline Scientist at CEA
SPIE Involvement:
Author
Publications (16)

SPIE Journal Paper | 24 June 2023
JM3, Vol. 22, Issue 03, 031210, (June 2023) https://doi.org/10.1117/12.10.1117/1.JMM.22.3.031210
KEYWORDS: X-rays, X-ray sources, Scattering, Grazing incidence, Silicon, Reflection, Laser scattering, Atomic force microscopy, X-ray microscopy, X-ray technology

Proceedings Article | 27 April 2023 Presentation + Paper
Proceedings Volume 12496, 124961K (2023) https://doi.org/10.1117/12.2657661
KEYWORDS: Transmission electron microscopy, Synchrotrons, Scanning electron microscopy, Critical dimension metrology, Semiconducting wafers, Cadmium, X-rays, Scattering, Lithography, Silicon

Proceedings Article | 27 April 2023 Presentation + Paper
Proceedings Volume 12496, 124961L (2023) https://doi.org/10.1117/12.2657500
KEYWORDS: X-rays, Scattering, X-ray sources, Grazing incidence, Silicon, Reflection, Metrology, Atomic force microscopy, Genetic algorithms, Signal intensity

Proceedings Article | 22 February 2021 Presentation + Paper
Proceedings Volume 11612, 116120A (2021) https://doi.org/10.1117/12.2583908
KEYWORDS: Etching, Oxides, Metals, Extreme ultraviolet, Resistance, Optical lithography, Silicon, Scanning transmission electron microscopy, Plasma etching, Nanolithography

Proceedings Article | 24 March 2020 Presentation
Guillaume Freychet, Dinesh Kumar, Isvar Cordova, Ron Pandolfi, Patrick Naulleau, Cheng Wang, Alex Hexemer
Proceedings Volume 11325, 113251A (2020) https://doi.org/10.1117/12.2552155

Showing 5 of 16 publications
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