Dr. Guillaume Freychet
Beamline Scientist at Brokhaven National Lab
SPIE Involvement:
Author
Publications (9)

SPIE Journal Paper | 3 May 2019
JM3 Vol. 18 Issue 02
KEYWORDS: Scattering, X-rays, 3D image reconstruction, Extreme ultraviolet, X-ray imaging, Extreme ultraviolet lithography, 3D image processing, Modulation, Carbon, Image enhancement

Proceedings Article | 26 March 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Lithography, Electron beam lithography, Scattering, Image processing, X-rays, Laser scattering, Line edge roughness, X-ray imaging, Photoresist processing, 3D image processing

Proceedings Article | 26 March 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Nanostructures, Data modeling, Scattering, X-rays, Manufacturing, Electron microscopes, Scanning electron microscopy, Data acquisition, Line width roughness, Line edge roughness

Proceedings Article | 9 October 2018
Proc. SPIE. 10809, International Conference on Extreme Ultraviolet Lithography 2018
KEYWORDS: Carbon, 3D image reconstruction, Modulation, Scattering, X-rays, Laser scattering, Extreme ultraviolet, Extreme ultraviolet lithography, X-ray imaging, Absorption

SPIE Journal Paper | 31 July 2018
JM3 Vol. 17 Issue 04
KEYWORDS: Metrology, Line width roughness, Critical dimension metrology, Sensors, X-rays, Scanning electron microscopy, Reflectivity, Scattering, Reliability, Manufacturing

Proceedings Article | 19 March 2018
Proc. SPIE. 10586, Advances in Patterning Materials and Processes XXXV
KEYWORDS: Optical lithography, 3D acquisition, Scattering, Etching, X-rays, 3D modeling, Directed self assembly, Integrated circuits

Showing 5 of 9 publications
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