Guillaume Marinier
at Univ de Rouen
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | April 24, 2003
Proc. SPIE. 5116, Smart Sensors, Actuators, and MEMS
KEYWORDS: Actuators, Gold, Microsystems, Silicon, Manufacturing, Carbon dioxide lasers, Fiber lasers, Light sources and illumination, Tapered optical fibers, Wet etching

PROCEEDINGS ARTICLE | April 24, 2003
Proc. SPIE. 5116, Smart Sensors, Actuators, and MEMS
KEYWORDS: Microelectromechanical systems, Actuators, Thin films, Photodetectors, Beam splitters, Microsystems, Amplifiers, Transducers, Phase shifts, Michelson interferometers

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