Dr. Gumin Kang Profile

Dr. Gumin Kang

at Univ of Colorado Boulder

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 19 April 2017 Presentation

Design and fabrication of high-Q chalcogenide glass micro-disk resonators (Conference Presentation)

Gumin Kang, Suehyun Cho, Molly Krogstad, Juliet Gopinath, Won Park

Proceedings Volume 10106, 1010609 (2017) https://doi.org/10.1117/12.2252509

KEYWORDS: Photoresist materials, Optical components, Resonators, Photonics, Infrared radiation, Chalcogenide glass, Edge roughness, Silica, Infrared materials, Optical lithography

Read Abstract +

Chalcogenide glass (ChG) which contain one or more chalcogen elements is one of the most interesting material for infrared (IR) photonics owing to its unique optical properties, such as high refractive index, strong optical nonlinearity, and wide infrared transparency. In this paper, we experimentally demonstrate high-quality ChG micro-disk resonators on oxidized silicon wafers fabricated by the standard UV photolithography and lift-off. Quality factor of micro-disk resonators are often limited by optical scattering loss induced by lithographically defined edge roughness. Thermal reflow of chalcogenide itself may significantly reduce edge roughness, but thermal shrinkage and deformation of the material during the reflow make it hard to precisely control the overall size and shape of the fabricated device. Instead, we reduce the sidewall roughness using thermal reflow of photoresist and modified bi-layer lift-off process. Typically, the thermal reflow of resist destroys the undercut or vertical sidewall profile of developed resist layer, making it extremely difficult or impossible to subsequently use lift-off or etching for patterning. We address this issue by first wet etching the silica substrate to undercut the reflowed photoresist, creating an overhang required for lift-off. ChG film is then deposited to produce a micro-disk resonator with much improved edge roughness. To finally create a micro-disk resonator on a silica pillar, we adopt vapor etching of the silica substrate. With optimized conditions of reflow and undercut, we obtained high quality ChG disk-resonators with extremely smooth edge profile, operating in the infrared region. Complete characterization results will be presented at the conference. The new method is compatible with traditional CMOS process and thus expected to have great potentials for fabricating high quality photonic integrated devices.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years