The hard X-ray nanoprobe at Taiwan Photon Source (TPS) makes use of the large numerical aperture obtained by nested Montel mirrors. To fully uptake the focusing power and flux, these mirrors requires the surface slope error no less than 0.05 μrad and are symmetrically placed with a 45 degrees cut for perfect surface matching. The beamline optics is designed to take the advantage of the symmetry of mirrors such that a round focal spot is accomplished. The final size of the focus spot are simulated below 40 nm at 9-15 keV. The whole facility including the beamline and the stations will be operated under vacuum to preserve photon coherence as well as to prevent the system from unnecessary environmental interference. The station equips with multimodal x-ray probes, including XRF, XAS, XEOL, projection microscope, CDI, etc. A SEM in close cooperation with laser interferometers is equipped to precisely locate the position of the sample. The beamline and the station are scheduled to be in commissioning phase in 2016.
Zone plate  has been used as a focal lens in transmission X-ray microscope (TXM) optical system in recent decades
[2, 3]. In TXM of NSRRC[4,5], the thickness of zone plate is about 900nm and the width of its out most zones is 50nm,
which has a high aspect ratio 18. When zone plate is tilted, the image quality will be affected by aberration. Since the
aspect ratio of zone plate is large, for incident beam, the shape of zone plate's transmission function will look different
when zone plate is tilted.
The both experimental and simulation result will be shown in this present. A five axes stage is designed and
manufactured for the zone plate holder for three dimensional movement, tip and tilt. According to Fourier theory, we can
calculate the wave distribution on image plane, if we know the original wave function, the distances between each
element, and the transparencies of the sample and zone plate. A parallel simulation process code in MATLAB is
developed in workstation cluster with up to 128Gbytes memory. The effects of aberration generated by tilt effect are
compared from the experimental data and simulation result. A maximum tilt angle within the acceptable image quality is
calculated by simulation and will be verified by experiment.
We have demonstrated dark-field imaging using a full-field hard x-ray microscope by using a custom capillary-based condenser. The condenser provides illumination with a numeric aperture about 3-mrad with high efficiency. This high illumination angle allows full-resolution imaging using a 50 nm hard x-ray zone plate. The zeroth order beam from the condenser is well out of the zoneplate range - which allows a high signal-to-noise ratio in the image plane. Small particles with high scattering power, such as colloidal gold markers used in biology are well-suited for dark-field imaging. Combining with high brightness source from NSRRC BL01B, the dark field image can be acquired within several minutes with high contrast ratio. In this paper, the dark field image of IC and the zoneplate defect will be demonstrated and studied in different energy under dark field mode.