Dr. Günter Grabosch Profile

Dr. Günter Grabosch

at SCHOTT

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Publications (3)

PROCEEDINGS ARTICLE | February 21, 2005

Analysis of laser durability of CaF2 for optical lithography

Proc. SPIE. 5647, Laser-Induced Damage in Optical Materials: 2004

KEYWORDS: Semiconductors, Lithography, Optical lithography, Lenses, Laser induced damage, Silver, Laser applications, Semiconductor lasers, Immersion lithography, Biological research

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PROCEEDINGS ARTICLE | May 28, 2004

Strong improvement of critical parameters of CaF2 lens blanks for 193-nm and 157-nm lithography

Proc. SPIE. 5377, Optical Microlithography XVII

KEYWORDS: Lithography, Photovoltaics, Refractive index, Birefringence, Annealing, Crystals, Wavefronts, Quantitative analysis, Lens blanks, 193nm lithography

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PROCEEDINGS ARTICLE | June 26, 2003

Critical enabling properties of CaF2 lens blanks for state-of-the-art lithography tools

Proc. SPIE. 5040, Optical Microlithography XVI

KEYWORDS: Lithography, Refractive index, Birefringence, Annealing, Crystals, Manufacturing, Lens design, Image quality, Lens blanks, 193nm lithography

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