Dr. Günter Grabosch
at SCHOTT
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | February 21, 2005
Proc. SPIE. 5647, Laser-Induced Damage in Optical Materials: 2004
KEYWORDS: Semiconductors, Lithography, Optical lithography, Lenses, Laser induced damage, Silver, Laser applications, Semiconductor lasers, Immersion lithography, Biological research

PROCEEDINGS ARTICLE | May 28, 2004
Proc. SPIE. 5377, Optical Microlithography XVII
KEYWORDS: Lithography, Photovoltaics, Refractive index, Birefringence, Annealing, Crystals, Wavefronts, Quantitative analysis, Lens blanks, 193nm lithography

PROCEEDINGS ARTICLE | June 26, 2003
Proc. SPIE. 5040, Optical Microlithography XVI
KEYWORDS: Lithography, Refractive index, Birefringence, Annealing, Crystals, Manufacturing, Lens design, Image quality, Lens blanks, 193nm lithography

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