Dr. Günter Schultes
Vice President for Research and Knowledge at HTW Saarland
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 19, 2009
Proc. SPIE. 7362, Smart Sensors, Actuators, and MEMS IV
KEYWORDS: Carbon, Thin films, Sensors, Sputter deposition, Metals, Crystals, Nickel, Resistance, Transmission electron microscopy, Temperature metrology

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