Dr. Guo-Tsai Huang
Technical Manager at Taiwan Semiconductor Manufacturing Co Ltd
SPIE Involvement:
Author
Publications (13)

Proceedings Article | 26 March 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Target detection, Diffraction, Metrology, Switching, Sensors, Etching, Scanning electron microscopy, Semiconducting wafers, Overlay metrology, Diffraction gratings

Proceedings Article | 13 March 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Metrology, Polarization, Etching, Physics, Scanning electron microscopy, Monte Carlo methods, Signal processing, Semiconductor manufacturing, Semiconducting wafers, Overlay metrology

Proceedings Article | 28 March 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Lithography, Diffraction, Metrology, Optical lithography, Image registration, Scatterometry, Optical metrology, Time metrology, Process control, High volume manufacturing, Target acquisition, Semiconducting wafers, Overlay metrology

Proceedings Article | 28 March 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Target detection, Wafer-level optics, Thin films, Diffraction, Metrology, Detection and tracking algorithms, Polarization, Image quality, Solids, Process control, Semiconducting wafers, Defense systems, Overlay metrology, Diffraction gratings

Proceedings Article | 2 April 2014
Proc. SPIE. 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII
KEYWORDS: Diffraction, Metrology, Etching, Scanners, Process control, Semiconducting wafers, Overlay metrology, Back end of line, Front end of line

Proceedings Article | 13 May 2013
Proc. SPIE. 8788, Optical Measurement Systems for Industrial Inspection VIII
KEYWORDS: Wafer-level optics, Semiconductors, Diffraction, Metrology, Sensors, Geometrical optics, Semiconducting wafers, Environmental sensing, Overlay metrology, Diffraction gratings

Showing 5 of 13 publications
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