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Dr. Guohua Yang
at Institute of Semiconductors CAS
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Publications (1)
Proceedings Article | 6 October 2006 Paper
Direct wafer bonding technology employing vacuum-cavity pre-bonding
Guohua Yang, Guorong He, Wanhua Zheng, Lianghui Chen
Proceedings Volume 6352, 63523I (2006) https://doi.org/10.1117/12.688864
KEYWORDS: Semiconducting wafers, Wafer bonding, Infrared imaging, Image transmission, Interfaces, Gallium arsenide, Semiconductors, Annealing, Protactinium, Scanning electron microscopy
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