Guojie Chen
Software Engineer at Anchor Semiconductor Inc
SPIE Involvement:
Publications (14)

Proceedings Article | 10 April 2024 Poster + Paper
Proceedings Volume 12955, 1295537 (2024)
KEYWORDS: Metrology, Resistance, Inspection, Critical dimension metrology, Design, Scanning electron microscopy, Overlay metrology, Semiconducting wafers, Defect detection

Proceedings Article | 26 May 2022 Presentation + Paper
Peng Wu, Qi Zhu, Jihong Yang, Changjie Sun, Yiming Zhu, Abhishek Vikram, Ye Chen, Guojie Cheng, Hui Wang, Qing Zhang, Wenkui Liao
Proceedings Volume 12052, 1205213 (2022)
KEYWORDS: Image processing, Scanning electron microscopy, Semiconducting wafers, Image analysis, Image classification, Machine learning, Image enhancement, Optical lithography

Proceedings Article | 22 February 2021 Presentation + Paper
Proceedings Volume 11614, 1161406 (2021)
KEYWORDS: Scanning electron microscopy, Wafer inspection, Machine learning, Semiconducting wafers, Databases, Defect detection, Wafer-level optics, Image processing, Semiconductor manufacturing, Optical proximity correction

Proceedings Article | 23 March 2020 Paper
Lijun Chen, Jun Zhu, Xuedong Fan, Haichang Zheng, Xiaolong Wang, Yancong Ge, Yu Zhang, Abhishek Vikram, Guojie Cheng, Hui Wang, Qing Zhang, Wenkui Liao
Proceedings Volume 11328, 113280Z (2020)
KEYWORDS: Monochromatic aberrations, Optical lithography, Semiconducting wafers, Scanning electron microscopy, Image processing, Image resolution, Lithography, Computational lithography, Critical dimension metrology, Semiconductors

Proceedings Article | 20 March 2019 Paper
Proceedings Volume 10962, 109620L (2019)
KEYWORDS: Scanning electron microscopy, Semiconducting wafers, Optical lithography, Defect detection, Etching, Process control, Image processing, Process engineering, Wafer inspection, Chemical mechanical planarization

Showing 5 of 14 publications
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