Dr. Guoqiang Xing
at Semiconductor Manufacturing International Corp
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | January 27, 2005
Proc. SPIE. 5645, Advanced Microlithography Technologies
KEYWORDS: Lithography, Optical lithography, Silica, Etching, Dielectrics, Coating, Scanning electron microscopy, Plasma etching, Semiconducting wafers, Plasma

PROCEEDINGS ARTICLE | January 27, 2005
Proc. SPIE. 5645, Advanced Microlithography Technologies
KEYWORDS: Wafer-level optics, Optical lithography, Data modeling, Etching, Design for manufacturing, Photomasks, Optical proximity correction, Photoresist processing, Semiconducting wafers, Model-based design

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