Dr. Guozheng Wang
at Changchun Univ. of Science and Technology
SPIE Involvement:
Author
Publications (23)

PROCEEDINGS ARTICLE | February 20, 2018
Proc. SPIE. 10697, Fourth Seminar on Novel Optoelectronic Detection Technology and Application
KEYWORDS: Etching, Polymers, Ions, Silicon, Oxygen, Plasma etching, Reactive ion etching, Semiconducting wafers, Shape memory alloys, Plasma

PROCEEDINGS ARTICLE | November 5, 2015
Proc. SPIE. 9795, Selected Papers of the Photoelectronic Technology Committee Conferences held June–July 2015
KEYWORDS: Silica, Etching, Interfaces, Silicon, Surface roughness, Corrosion, Silicon films, Wet etching, Semiconducting wafers, Electrochemical etching

PROCEEDINGS ARTICLE | March 5, 2015
Proc. SPIE. 9521, Selected Papers from Conferences of the Photoelectronic Technology Committee of the Chinese Society of Astronautics 2014, Part I
KEYWORDS: Thin films, Microchannel plates, Silicon, Resistance, Zinc, Silicon films, Atomic layer deposition, Aluminum, Low pressure chemical vapor deposition, Zinc oxide

PROCEEDINGS ARTICLE | March 4, 2015
Proc. SPIE. 9521, Selected Papers from Conferences of the Photoelectronic Technology Committee of the Chinese Society of Astronautics 2014, Part I
KEYWORDS: Oxides, Silica, Microchannel plates, Crystals, Silicon, Oxygen, Silicon photomultipliers, Thermal oxidation, Electrochemical etching, Oxidation

PROCEEDINGS ARTICLE | August 16, 2013
Proc. SPIE. 8912, International Symposium on Photoelectronic Detection and Imaging 2013: Low-Light-Level Technology and Applications
KEYWORDS: Microsystems, Etching, Microchannel plates, Crystals, Silicon, Scanning electron microscopy, Semiconducting wafers, Anisotropic etching, Electrochemical etching, Temperature metrology

PROCEEDINGS ARTICLE | August 16, 2013
Proc. SPIE. 8912, International Symposium on Photoelectronic Detection and Imaging 2013: Low-Light-Level Technology and Applications
KEYWORDS: Thin films, Silica, Microchannel plates, Dielectrics, Silicon, Oxygen, Silicon films, Semiconducting wafers, Thermal oxidation, Oxidation

Showing 5 of 23 publications
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