Dr. Guozheng Wang
at Changchun Univ. of Science and Technology
SPIE Involvement:
Author
Publications (23)

Proceedings Article | 20 February 2018
Proc. SPIE. 10697, Fourth Seminar on Novel Optoelectronic Detection Technology and Application
KEYWORDS: Etching, Silicon, Reactive ion etching, Ions, Plasma, Shape memory alloys, Polymers, Semiconducting wafers, Plasma etching, Oxygen

Proceedings Article | 5 November 2015
Proc. SPIE. 9795, Selected Papers of the Photoelectronic Technology Committee Conferences held June–July 2015
KEYWORDS: Corrosion, Silicon, Etching, Silica, Surface roughness, Silicon films, Wet etching, Semiconducting wafers, Interfaces, Electrochemical etching

Proceedings Article | 5 March 2015
Proc. SPIE. 9521, Selected Papers from Conferences of the Photoelectronic Technology Committee of the Chinese Society of Astronautics 2014, Part I
KEYWORDS: Microchannel plates, Resistance, Silicon, Thin films, Atomic layer deposition, Low pressure chemical vapor deposition, Silicon films, Aluminum, Zinc oxide, Zinc

Proceedings Article | 4 March 2015
Proc. SPIE. 9521, Selected Papers from Conferences of the Photoelectronic Technology Committee of the Chinese Society of Astronautics 2014, Part I
KEYWORDS: Silicon, Silica, Oxygen, Oxides, Microchannel plates, Thermal oxidation, Silicon photomultipliers, Crystals, Electrochemical etching, Oxidation

Proceedings Article | 16 August 2013
Proc. SPIE. 8912, International Symposium on Photoelectronic Detection and Imaging 2013: Low-Light-Level Technology and Applications
KEYWORDS: Etching, Silicon, Anisotropic etching, Semiconducting wafers, Crystals, Temperature metrology, Scanning electron microscopy, Microchannel plates, Electrochemical etching, Microsystems

Showing 5 of 23 publications
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