Dr. Gustaf Winroth
Research Programme Officer at imec
Publications (11)

Proceedings Article | 4 April 2014
Proc. SPIE. 9052, Optical Microlithography XXVII
KEYWORDS: Waveguides, Silicon photonics, Wave propagation, Silicon, Photonics, Optical lithography, Semiconducting wafers, Etching, Immersion lithography, CMOS technology

Proceedings Article | 31 March 2014
Proc. SPIE. 9052, Optical Microlithography XXVII
KEYWORDS: Lithography, Optical lithography, Silicon, Ion implantation, Light wave propagation, 3D modeling, Photomasks, Critical dimension metrology, Waveguides

SPIE Journal Paper | 1 October 2013
JM3 Vol. 12 Issue 04
KEYWORDS: Etching, Line width roughness, Double patterning technology, Photomasks, Silicon, Amorphous silicon, Plasma, Optical lithography, Chemistry, Critical dimension metrology

SPIE Journal Paper | 5 September 2013
JM3 Vol. 12 Issue 04
KEYWORDS: Photoresist materials, Lithography, Ions, Ion implantation, Critical dimension metrology, Scanning electron microscopy, Annealing, Optical lithography, Etching, Photomasks

Proceedings Article | 1 April 2013
Proc. SPIE. 8679, Extreme Ultraviolet (EUV) Lithography IV
KEYWORDS: Photomasks, Extreme ultraviolet lithography, Scanners, Stochastic processes, Nanoimprint lithography, Lithography, Metrology, Photoresist processing, Computer simulations, Extreme ultraviolet

Showing 5 of 11 publications
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