Guy Ben-Zvi
Managing Director at Carl Zeiss SMS Ltd
SPIE Involvement:
Publications (19)

Proceedings Article | 8 November 2012 Paper
Proceedings Volume 8522, 85220D (2012)
KEYWORDS: Photomasks, Image registration, Scanners, Semiconducting wafers, Manufacturing, Overlay metrology, Metrology, Silica, Double patterning technology, Algorithm development

Proceedings Article | 16 April 2012 Paper
Proceedings Volume 8352, 83520A (2012)
KEYWORDS: Photomasks, Image registration, Scanners, Manufacturing, Semiconducting wafers, Silica, Overlay metrology, Double patterning technology, Metrology, Algorithm development

Proceedings Article | 23 March 2011 Paper
Proceedings Volume 7973, 797312 (2011)
KEYWORDS: Photomasks, Image registration, Overlay metrology, Scanners, Metrology, Manufacturing, Semiconducting wafers, Silica, Algorithm development, Prototyping

Proceedings Article | 4 March 2010 Paper
Gek Soon Chua, Chason Eran, Sia Kim Tan, Byoung IL Choi, Teng Hwee Ng, Poh Ling Lua, Ofir Sharoni, Guy Ben-Zvi
Proceedings Volume 7640, 76402U (2010)
KEYWORDS: Scanners, Semiconducting wafers, Reticles, Critical dimension metrology, Photomasks, Databases, Calibration, Associative arrays, Data conversion, Printing

Proceedings Article | 14 December 2009 Paper
Sz-Huei Wang, Guy Ben-Zvi, Yu-Wan Chen, Chung Ming Kuo, Erez Graitzer, Avi Cohen
Proceedings Volume 7520, 75202B (2009)
KEYWORDS: Photomasks, Semiconducting wafers, Lithography, Semiconductors, Scanning electron microscopy, Inspection, Lawrencium, Electroluminescence, Manufacturing, Defect inspection

Showing 5 of 19 publications
  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top