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Gwang Suk Hwang
at Korea Univ
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Publications (1)
Proceedings Article | 30 December 2008 Paper
Exact locating of sub-surface microelectronic structures using scanning thermal-wave microscopy
Jaehun Chung, Kyeongtae Kim, Gwangseok Hwang, Ohmyoung Kwon, Joon Sik Lee, Seungho Park, Young Ki Choi
Proceedings Volume 7268, 72681V (2008) https://doi.org/10.1117/12.810688
KEYWORDS: Metals, Phase measurement, Microscopy, Resistance, Microelectronics, Aluminum, Nondestructive evaluation, Wave propagation, Gold, Thermography
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