In this paper, micro-surface roughness has been experimentally identified using laser scattering images. At first, previous
surface evaluation methods, laser scattering parameters and optical deflected rays are investigated and then laser
scattering inspection mechanism is developed. Its optimum parameters on grinding surfaces are selected using a design
of experiment. It is shown that the mean of vertical scattering distributions is characterized as wavelet in laser scattering
images with the selected optimal parameters. Also, the dominant feature of laser scattering distributions is linearly
increased according to grinding surface roughness and so the information can be used as important factor for the
measurement and evaluation of various surface roughnesses. The proposed laser scattering method is applied to the
evaluation inspection of crystalline silicon wafer surfaces for solar cell.