Prof. H. Paul Urbach
Professor at Technische Univ Delft
SPIE Involvement:
Conference Program Committee | Author | Editor | Student Chapter Advisor
Publications (48)

Proceedings Article | 25 February 2020
Proc. SPIE. 11303, Emerging Liquid Crystal Technologies XV
KEYWORDS: Finite element methods, Liquid crystal on silicon, Spatial light modulators, Optical simulations, 3D modeling, Diffraction, Liquid crystals

Proceedings Article | 9 September 2019
Proc. SPIE. 11105, Novel Optical Systems, Methods, and Applications XXII
KEYWORDS: Imaging systems, Modulation transfer functions, Wavefronts, Point spread functions, Zemax, Optical simulations

Proceedings Article | 3 September 2019
Proc. SPIE. 11089, Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XVI
KEYWORDS: Phase retrieval, Extreme ultraviolet, Photomasks, Inspection, Nanostructures, Coherence imaging, Fourier transforms, Metrology

SPIE Journal Paper | 9 April 2019
OE Vol. 58 Issue 04
KEYWORDS: Wavefronts, Extreme ultraviolet, Wavefront sensors, Diffraction, Extreme ultraviolet lithography, Photomasks, Imaging systems, Photons, Error analysis, Optical engineering

Proceedings Article | 1 March 2019
Proc. SPIE. 10941, Emerging Liquid Crystal Technologies XIV
KEYWORDS: Liquid crystal on silicon, Diffraction, Diffraction gratings, Reflectivity, Finite element methods, Phase shifts, Phase measurement, Telecommunications

Showing 5 of 48 publications
Proceedings Volume Editor (2)

SPIE Conference Volume | 10 December 2012

SPIE Conference Volume | 5 November 2010

Conference Committee Involvement (15)
Computational Optics 2021
13 September 2021 | Madrid, Spain
Optical Design and Testing X
11 October 2020 | Beijing, China
Optical Design and Testing IX
21 October 2019 | Hangzhou, China
Advanced Optical Imaging Technologies II
21 October 2019 | Hangzhou, China
Advanced Optical Imaging Technologies
12 October 2018 | Beijing, China
Showing 5 of 15 Conference Committees
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