Prof. Hai Deng
at Fudan University
SPIE Involvement:
Publications (11)

Proceedings Article | 23 March 2020 Paper
Proceedings Volume 11326, 113261E (2020)
KEYWORDS: Annealing, Directed self assembly, Optical lithography, Liquid crystals, Scanning electron microscopy, X-rays

Proceedings Article | 13 March 2018 Paper
Hai Deng, Xuemiao Li, Yu Peng, Jianuo Zhou
Proceedings Volume 10586, 105861E (2018)
KEYWORDS: Annealing, Directed self assembly, Polymerization, Polymers, Stars

Proceedings Article | 26 March 2008 Paper
Proceedings Volume 6923, 69230S (2008)
KEYWORDS: Line edge roughness, Monte Carlo methods, Diffusion, Lithography, Chemically amplified resists, Image processing, Electron beams, Extreme ultraviolet, Electron beam lithography, Extreme ultraviolet lithography

SPIE Journal Paper | 1 October 2007
JM3, Vol. 6, Issue 04, 043004, (October 2007)
KEYWORDS: Line edge roughness, Monte Carlo methods, Lithography, Molecules, Diffusion, Image enhancement, Electron beam lithography, Ionization, Electron beams, Polymers

Proceedings Article | 15 March 2007 Paper
Xavier André, Jin Kyun Lee, Anuja De Silva, Nelson Felix, Christopher Ober, Heidi Cao, Hai Deng, Hiroto Kudo, Daisuke Watanabe, Tadatomi Nishikubo
Proceedings Volume 6519, 65194B (2007)
KEYWORDS: Glasses, Lithography, Magnesium, Photoresist materials, Electron beam lithography, Deep ultraviolet, Photoresist developing, Polymers, Extreme ultraviolet, Semiconducting wafers

Showing 5 of 11 publications
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