Prof. Ha-Duong Ngo
Prof. at Technische Univ Berlin
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 17 May 2013
Proc. SPIE. 8763, Smart Sensors, Actuators, and MEMS VI
KEYWORDS: Microelectromechanical systems, Packaging, Gold, Sensors, Metals, Glasses, Silicon, Sensor performance, Semiconducting wafers, Environmental sensing

Proceedings Article | 17 May 2013
Proc. SPIE. 8763, Smart Sensors, Actuators, and MEMS VI
KEYWORDS: Microelectromechanical systems, Actuators, Sensors, Silicon, Power supplies, Microactuators, Finite element methods, Convection, Electromagnetism, Temperature metrology

Proceedings Article | 5 May 2011
Proc. SPIE. 8066, Smart Sensors, Actuators, and MEMS V
KEYWORDS: Microelectromechanical systems, Sensors, Etching, Crystals, Silicon, Photoresist materials, Finite element methods, Silicon carbide, Temperature metrology, Single crystal X-ray diffraction

Proceedings Article | 11 February 2011
Proc. SPIE. 7928, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices X
KEYWORDS: Microelectromechanical systems, Packaging, Nanostructures, Sensors, Silicon, Reliability, Telecommunications, Photonics, Semiconducting wafers, Wafer bonding

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