Dr. Hae-Jeong Lee
Researcher at National Institute of Standards and Technology
SPIE Involvement:
Publications (7)

Proceedings Article | 28 March 2008 Paper
Proc. SPIE. 6921, Emerging Lithographic Technologies XII
KEYWORDS: Dielectrics, Reflectivity, Picosecond phenomena, Nanoimprint lithography, X-rays, Skin, Scattering, Optical lithography, Electron beam lithography, Silicon

Proceedings Article | 25 March 2008 Paper
Proc. SPIE. 6922, Metrology, Inspection, and Process Control for Microlithography XXII
KEYWORDS: X-rays, Polymers, Reflectivity, Metrology, Data modeling, Silicon, Picosecond phenomena, X-ray sources, Thin films, Scattering

Proceedings Article | 5 April 2007 Paper
Proc. SPIE. 6518, Metrology, Inspection, and Process Control for Microlithography XXI
KEYWORDS: X-rays, Reflectivity, Silicon, Data modeling, Metrology, X-ray sources, Scattering, Nanoimprint lithography, Lithography, Laser scattering

Proceedings Article | 15 March 2007 Paper
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Nanoimprint lithography, Dielectrics, Reflectivity, Optical lithography, X-rays, Silicon, Semiconductors, Thin films, Electron beam lithography, Lithography

Proceedings Article | 23 March 2006 Paper
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Silicon, Reflectivity, X-rays, Data modeling, Nanoimprint lithography, Oxides, Scattering, Semiconducting wafers, Nanostructures, Reactive ion etching

Showing 5 of 7 publications
  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top