Hae Nam Jeong
at Hanyang Univ
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 26 October 2017 Paper
Proceedings Volume 10450, 104501Q (2017) https://doi.org/10.1117/12.2281036
KEYWORDS: Pellicles, Extreme ultraviolet, Extreme ultraviolet lithography, Silicon carbide, Finite element methods, Graphene

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