Haeng-Leem Jeon
at Dongbu Electronics Co Ltd
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 5 April 2007
Proc. SPIE. 6518, Metrology, Inspection, and Process Control for Microlithography XXI
KEYWORDS: Lithography, Optical lithography, Etching, Diffusion, Reflectivity, Scanning electron microscopy, Photoresist materials, Process control, Line edge roughness, Temperature metrology

Proceedings Article | 20 March 2006
Proc. SPIE. 6154, Optical Microlithography XIX
KEYWORDS: Lithography, Diffraction, Optical lithography, Lithographic illumination, Reflection, Light scattering, Photomasks, Critical dimension metrology, Photoresist processing, Light

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top