Dr. Hagen Bartzsch
at Fraunhofer-FEP
SPIE Involvement:
Author
Publications (8)

PROCEEDINGS ARTICLE | May 11, 2017
Proc. SPIE. 10181, Advanced Optics for Defense Applications: UV through LWIR II
KEYWORDS: Optical filters, Refractive index, Antireflective coatings, Holography, Sputter deposition, Glasses, Coating, Optical coatings, Niobium, Coating equipment

PROCEEDINGS ARTICLE | May 8, 2017
Proc. SPIE. 10194, Micro- and Nanotechnology Sensors, Systems, and Applications IX
KEYWORDS: Thin films, Switches, Sputter deposition, Metals, Silicon, Energy harvesting, Aluminum, Aluminum nitride, Thin film deposition, Scandium

PROCEEDINGS ARTICLE | May 21, 2015
Proc. SPIE. 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
KEYWORDS: Thin films, Ferroelectric materials, Sensors, Sputter deposition, Doping, Energy harvesting, Aluminum, Aluminum nitride, Scandium, Plasma

PROCEEDINGS ARTICLE | May 5, 2011
Proc. SPIE. 8066, Smart Sensors, Actuators, and MEMS V
KEYWORDS: Thin films, Sensors, Ultrasonography, Sputter deposition, Electrodes, Silicon, Ultrasonics, Transducers, Aluminum nitride, Phased arrays

PROCEEDINGS ARTICLE | September 25, 2008
Proc. SPIE. 7101, Advances in Optical Thin Films III
KEYWORDS: Oxides, Multilayers, Silica, Reflection, Argon, Sputter deposition, Silicon, Nitrogen, Oxygen, Plasma

PROCEEDINGS ARTICLE | October 5, 2005
Proc. SPIE. 5963, Advances in Optical Thin Films II
KEYWORDS: Refractive index, Antireflective coatings, Multilayers, Phase modulation, Sputter deposition, Coating, Resistance, Climatology, Plasma, Protactinium

Showing 5 of 8 publications
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