Hai-Joong Park
at Inha Univ
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | February 11, 2009
Proc. SPIE. 7219, Optoelectronic Integrated Circuits XI
KEYWORDS: Lithography, Refractive index, Optical lithography, Silica, Waveguides, Cladding, Etching, Ultraviolet radiation, Photoresist materials, Wet etching

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