Dr. HaiXia Shang
at Univ de Rennes 1
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 3 October 2003
Proc. SPIE. 5145, Microsystems Engineering: Metrology and Inspection III
KEYWORDS: Microelectromechanical systems, Moire patterns, Mica, Mechanics, Scanners, Crystals, Atomic force microscopy, Scanning electron microscopy, Electronic components, Spatial resolution

Proceedings Article | 29 April 2003
Proc. SPIE. 5058, Optical Technology and Image Processing for Fluids and Solids Diagnostics 2002

Proceedings Article | 29 April 2003
Proc. SPIE. 5058, Optical Technology and Image Processing for Fluids and Solids Diagnostics 2002

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