Haidong Liang
at National Univ of Singapore
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 14, 2013
Proc. SPIE. 8629, Silicon Photonics VIII
KEYWORDS: Oxides, Waveguides, Ultraviolet radiation, Ions, Silicon, Scanning electron microscopy, Photoresist materials, Ion beams, Reactive ion etching, Semiconducting wafers

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