Dr. Haijing Peng
at Chinese Univ of Hong Kong
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 30, 2003
Proc. SPIE. 5144, Optical Measurement Systems for Industrial Inspection III
KEYWORDS: Semiconductors, Photoelasticity, Modulation, Birefringence, Sensors, Silicon, Amplifiers, Polarizers, Semiconducting wafers, Signal detection

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